Microelectromechanical systems (MEMS) technology has ... high-performance deformable mirrors for adaptive-optics-enhanced imaging. The idea of using an array of actuators to change the shape ...

MAICO ® has a one-of-a-kind subunit structure that houses all of the ... As a spot scanning device, the 29 kHz resonant type high-speed MEMS mirror was used. The MEMS mirror can scan at up ...