These devices, despite their micro scale, perform a wide array of functions ... kidney dialysis; drug infusion pumps; MEMS electrodes used in neuro-signal detection and neuro-stimulation applications.

What’s tiny and on track to be worth $22 billion dollars by 2018? MEMS (Micro Electrical Mechanical Systems). That’s a catch-all phrase for microscopic devices that have moving parts.

[Breaking Taps] has an investigation of a MEMS chip. MEMS is short for Micro Electromechanical Systems, which operate in a decidedly mechanical way. You can see the video, which has some gorgeous ...

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized ... Our recent work has fabricated hemispherical ...