These devices, despite their micro scale, perform a wide array of functions ... kidney dialysis; drug infusion pumps; MEMS electrodes used in neuro-signal detection and neuro-stimulation applications.

[Breaking Taps] has an investigation of a MEMS chip. MEMS is short for Micro Electromechanical Systems, which operate in a decidedly mechanical way. You can see the video, which has some gorgeous ...

What’s tiny and on track to be worth $22 billion dollars by 2018? MEMS (Micro Electrical Mechanical Systems). That’s a catch-all phrase for microscopic devices that have moving parts.

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized ... Our recent work has fabricated hemispherical ...