MEMS mirrors are among the most promising devices for the new wave of MEMS actuator devices. The general purpose of the devices(s) is to deviate a laser beam and scan a two-dimensional target. To ...

This paper reports a micro-oven-controlled silicon oscillator with electrostatic tuning for frequency trimming for the first time. The resonator is degenerately doped with phosphorous and micro-oven ...

The global Micropump Market is estimated to be valued at USD 1.87 million in 2025 and is projected to reach USD 8.03 million by 2035, registering a compound annual growth rate (CAGR) of 15.7% over the ...