MEMS is an acronym that stands for microelectromechanical systems – exceptionally small devices that incorporate mechanical, electrical, and frequently optical components on a single microchip. These ...

What’s tiny and on track to be worth $22 billion dollars by 2018? MEMS (Micro Electrical Mechanical Systems). That’s a catch-all phrase for microscopic devices that have moving parts.

[Breaking Taps] has an investigation of a MEMS chip. MEMS is short for Micro Electromechanical Systems, which operate in a decidedly mechanical way. You can see the video, which has some gorgeous ...

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized ... Our recent work has fabricated hemispherical ...